10061601Enhanced position feedback and actuation control for stages with three motion axis in Z/tip/tiltClosedCollaborative R&DInnovate UKPrior Scientific are looking for an innovative solution to develop Queensgate control for Z/tip/tilt and tip/tilt nanopositioning stages and effective strategies for calibration. The project proposed will require further development of the NPL nanopositioning test rig using a combination of interferometers and autocollimators to measure angular displacement where angular movements are dominant. This equipment will map the performance of the Z/tip/tilt and tip/tilt stages such that control strategies and appropriate calibration rigs can be developed for Queensgate Z/tip/tilt stages. It is anticipated that this will allow us to further develop semiconductor and photonics solutions with potential for multi-axis solutions with five and six axes.