710563Low-cost massively-parallel assembly process for MEMS componentsClosedGRD Proof of ConceptInnovate UKAccelerometers, gyroscopes and microphones are just some of the everyday applications of microelectromechanical systems (MEMS) that are now ubiquitous components in consumer electronic devices. As manufacturers of smart phones and tablets endeavour to shrink their devices ever further, so the wasted space between components in these devices becomes ever more inhibiting, both in terms of physical size and cost. Separating the manufacturing processes of the MEMS component and the host chip can enable massive space and cost savings to be realised, but only if the process designed to subsequently combine the two is low-cost and high-throughput. Nu Nano is developing a process of this nature which is capable of addressing 400 MEMS components simultaneously and targeting a 90% reduction in manufacturing costs. Nu Nano will demonstrate this by manufacturing probes for atomic force microscopy (AFM). These probes, made from silicon, consist of a cantilever and tip, much akin to a record player cantilever and stylus, but the rest of the silicon area is only used for handling. By separating the fabrication of the complex functional part of the probe and the bulk chip material, this massive cost saving will be realised