10006091High throughput multiprobe Rapid Probe Microscope systemClosedFeasibility StudiesInnovate UKInfinitesima has developed a fundamentally different atomic force 3D surface measurement technique, the Rapid Probe Microscope. This combines revolutionary thermal-optical actuation with an interferometric measurement system delivering picometer precision and speeds \>100x faster than those achievable with conventional Atomic Force Microscope systems. This project aims to increase this throughput further by multiplexing the interferometry and actuation across many levers, bringing a further \>10x speed improvement. This will be of direct value to address the metrology challenges impacting the semiconductor fabrication processes of smaller and increasingly 3D features being developed and manufactured currently.