10140505On-wafer microwave metrology for future industrial applications (On-Micro)ActiveEU-FundedHorizon Europe GuaranteeSemiconductor chips are used in many established and emerging applications, e. g. , 6G telecommunications, automotive radar sensors, space-deployed radiometers for earth monitoring, and wearable electronics for healthcare. However, there is currently a lack of traceable measurement techniques for millimetre-wave and terahertz (THz) planar integrated circuits (ICs), particularly those based on compound semiconductors. Thus, in order to strengthen the European semiconductor industry and facilitate the development of next-generation semiconductor technologies, new accurate and traceable on-wafer measurement techniques are needed together with best practice guides for on-wafer measurement. In addition, improved methods are needed for the characterisation of compound transistors above 110 GHz, and for novel 2D, thin film and semiconductor materials.