720423Development of Smart NDIR CO2 Gas Detector Based on MEMS CMOS IR Source and Detector Technology of Capnography applicationsClosedGRD Development of PrototypeInnovate UKCambridge CMOS Sensors (CCS) is one of the leading providers of ultra-low power, high temperature micro-hotplate devices that is readily integrated on the same silicon platform used for microprocessor chips, thereby enabling the capabilities of producing a new generation miniature sensors for medical, consumer, industrial and automotive applications. In collaboration with University of Cambridge, and large multi-national silicon foundry partners, CCS has pioneered the production of these micro-hotplates by developing and optimising Deep Reactive Ion Etching (DRIE) process that is used for making Micro Electromechanical System (MEMS) components. The benefit of CCS technology is that it uses standard Complementary Metal Oxide Semiconductor (CMOS), silicon wafers, which is ideal for high volume, low cost applications. These micro-hotplate devices have many uses, which includes miniature catalytic and resistive gas sensors, broadband mid-infrared emitter for gas sensing and spectroscopy applications, flow sensors, and smart sensors with on-chip control circuits. One of the first products developed by CCS based on micro-hotplates is the broadband midinfrared emitter. These emitters are being used for Non-Dispersive Infrared (NDIR) gas sensing applications for greenhouse gas monitoring (such as carbon dioxide, methane, nitrogen oxide) as well as human breath analysis for medical applications (such as carbon dioxide monitoring). Furthermore, using the same platform technology CCS has also developed highly innovative matching broadband IR detectors that are used with the emitter for NDIR gas sensing application. In this project we aim to take advantage of the above unique technological advantages to develop one of the most compact carbon dioxide, (CO2) gas sensors for human breath analysis that will focus on enabling low cost capnography applications but without compromising on accuracy.