130842Tantalum carbide coatings for high temperature barrier layers in the semiconductor industryClosedFeasibility StudiesInnovate UKThe advent of high power blue & UV LEDs has enabled full colour LED TV displays and white LED automotive and domestic lighting. These are based on Gallium Nitride which is deposited by the MOCVD process on substrate wafers supported on CVD SiC coated graphite furniture. During processing the SiC coating is attacked by the ammonia gas employed in the process, reducing lifetime. A new more inert coating is required to enhance coating lifetime and reduce overall cost. Tantalum carbide is seen by the industry as a replacement which can greatly enhance resistance to this aggressive atmosphere and provide a solution which is not yet available. ATL aims to develop the TaC CVD coating which will enable penetration into the large and growing market for GaN based LEDs and power semiconductors. ATL’s aim is to sell CVD TaC coated graphite parts and industrial scale coating equipment to suppliers of the semiconductor industry.