Real-time monitoring and control of magnetron sputter deposition of thin coatings

The aim of this project is to develop a strategy for real-time monitoring and control of physical vapour

deposition processes to increase the reproducibility of vital parameters such as coating thickness, coating

composition, coating adhesion and vacuum quality and thereby provide significantly enhanced quality

assurance of the coatings produced. This will enable penetration of the estimated seventy five percent of the

market for PVD coatings in high value manufacturing that is not currently served, supporting innovation in this

important sector of the UK economy. Monitoring and control of all process stages – evacuation, substrate

cleaning and coating deposition - will be, innovatively, undertaken using a single technology – optical emission

spectrometry. This will be used to identify and monitor relevant emission lines associated with particular

process stages to identify and signal end points, including the thickness of the coating deposited. The approach

will also be applied to condition monitoring of the coating equipment to optimise maintenance schedules and

system availability