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Advantages of Energy Selective Secondary Electron Detection in SEM (2010)

First Author: Rodenburg C

Attributed to: Quantitative, high resolution two-and-three dimensional dopant mapping in the Scanning Electron Microscope by Secondary Electron Spectro-Micro funded by EPSRC

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1017/s1431927610053754

Publication URI: http://dx.doi.org/10.1017/s1431927610053754

Type: Journal Article/Review

Parent Publication: Microscopy and Microanalysis

Issue: S2