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Post processing of microstructures by PDMS spray deposition (2009)

First Author: Choonee K

Attributed to: Platform Support for 3D Electrical MEMS funded by EPSRC

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1016/j.sna.2009.08.029

Publication URI: http://dx.doi.org/10.1016/j.sna.2009.08.029

Type: Journal Article/Review

Parent Publication: Sensors and Actuators A: Physical

Issue: 2