A hybrid photonics based sensor for surface measurement (2014)
Attributed to:
A chip device for on-line assessment in nano-scale surface manufacture
funded by
EPSRC
Abstract
No abstract provided
Bibliographic Information
Digital Object Identifier: http://dx.doi.org/10.1016/j.cirp.2014.03.046
Publication URI: http://dx.doi.org/10.1016/j.cirp.2014.03.046
Type: Journal Article/Review
Parent Publication: CIRP Annals
Issue: 1
ISSN: 0007-8506