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Deterministic Fabrication of Micro- and Nanostructures by Focused Ion Beam

First Author: Sun J

Attributed to: Miniature Flexible & Reconfigurable Manufacturing System for 3D Micro-products funded by EPSRC

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1007/978-3-319-02874-3_7

Publication URI: http://dx.doi.org/10.1007/978-3-319-02874-3_7

Type: Book Chapter

Book Title: FIB Nanostructures (2013)

Page Reference: 161-204

ISBN: 21952159