Deterministic Fabrication of Micro- and Nanostructures by Focused Ion Beam
Attributed to:
Miniature Flexible & Reconfigurable Manufacturing System for 3D Micro-products
funded by
EPSRC
Abstract
No abstract provided
Bibliographic Information
Digital Object Identifier: http://dx.doi.org/10.1007/978-3-319-02874-3_7
Publication URI: http://dx.doi.org/10.1007/978-3-319-02874-3_7
Type: Book Chapter
Book Title: FIB Nanostructures (2013)
Page Reference: 161-204
ISBN: 21952159