6BB45D0E-AC91-442F-810B-14F5289DA711University of Newcastle - Equipment AccountResearch GrantEP/K022679/1798CB33D-C79E-4578-83F2-72606407192CEPSRCINCOME_ACTUAL3009791E26A1529-02B2-4D8B-A899-012CF0EF92A0Performance characterization of microelectromechanical sensors using laser Doppler vibrometry, Polytec In-Focus Magazine 2014f62b187c58a68dd7c25721a9f5bd2948Dr J Hedley2014-01-01Other56e0282d247b07.32025491