Insight into mechanics of AFM tip-based nanomachining: bending of cantilevers and machined grooves. (2016)
Attributed to:
Novel Instrumentation for High-Speed AFM-based Nano Machining
funded by
EPSRC
Abstract
No abstract provided
Bibliographic Information
Digital Object Identifier: http://dx.doi.org/10.1088/0957-4484/27/38/385302
PubMed Identifier: 27532247
Publication URI: http://europepmc.org/abstract/MED/27532247
Type: Journal Article/Review
Volume: 27
Parent Publication: Nanotechnology
Issue: 38
ISSN: 0957-4484