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Micromachined cantilevers-on-membrane topology for broadband vibration energy harvesting (2016)

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1088/0960-1317/26/12/124007

Publication URI: http://dx.doi.org/10.1088/0960-1317/26/12/124007

Type: Journal Article/Review

Parent Publication: Journal of Micromechanics and Microengineering

Issue: 12