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Electron power absorption dynamics in capacitive radio frequency discharges driven by tailored voltage waveforms in CF 4 (2016)

First Author: Brandt S

Attributed to: Interactions between micro-plasma devices funded by EPSRC

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1088/0963-0252/25/4/045015

Publication URI: http://dx.doi.org/10.1088/0963-0252/25/4/045015

Type: Journal Article/Review

Parent Publication: Plasma Sources Science and Technology

Issue: 4