Material and optical properties of low-temperature NH 3 -free PECVD SiN x layers for photonic applications (2017)
Attributed to:
CORNERSTONE: Capability for OptoelectRoNics, mEtamateRialS, nanoTechnOlogy aNd sEnsing
funded by
EPSRC
Abstract
No abstract provided
Bibliographic Information
Digital Object Identifier: http://dx.doi.org/10.1088/1361-6463/50/2/025106
Publication URI: http://dx.doi.org/10.1088/1361-6463/50/2/025106
Type: Journal Article/Review
Parent Publication: Journal of Physics D: Applied Physics
Issue: 2