Large area high-speed metrology SPM system. (2015)
Attributed to:
High-Speed AFM
funded by
NERC
Abstract
No abstract provided
Bibliographic Information
Digital Object Identifier: http://dx.doi.org/10.1088/0957-4484/26/6/065501
PubMed Identifier: 25597347
Publication URI: http://europepmc.org/abstract/MED/25597347
Type: Journal Article/Review
Volume: 26
Parent Publication: Nanotechnology
Issue: 6
ISSN: 0957-4484