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New perspectives on nano-engineering by secondary electron spectroscopy in the helium ion and scanning electron microscope (2018)

First Author: Stehling N

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1557/mrc.2018.75

Publication URI: http://dx.doi.org/10.1557/mrc.2018.75

Type: Journal Article/Review

Parent Publication: MRS Communications

Issue: 2

ISSN: 2159-6859