Silicon photonic beam steering module with backside coupling elements toward dense heterogeneous integration with drive electronics (2021)
Attributed to:
CORNERSTONE: Capability for OptoelectRoNics, mEtamateRialS, nanoTechnOlogy aNd sEnsing
funded by
EPSRC
Abstract
No abstract provided
Bibliographic Information
Digital Object Identifier: http://dx.doi.org/10.1063/5.0065210
Publication URI: http://dx.doi.org/10.1063/5.0065210
Type: Journal Article/Review
Parent Publication: APL Photonics
Issue: 11