Analysis of Silicon Germanium Standards for the Quantification of SiGe Microelectronic Devices Using AES (2015)
Attributed to:
CORNERSTONE: Capability for OptoelectRoNics, mEtamateRialS, nanoTechnOlogy aNd sEnsing
funded by
EPSRC
Abstract
No abstract provided
Bibliographic Information
Digital Object Identifier: http://dx.doi.org/10.1116/11.20141102
Publication URI: http://dx.doi.org/10.1116/11.20141102
Type: Journal Article/Review
Parent Publication: Surface Science Spectra
Issue: 1