(Invited, Digital Presentation) Improved Reliability of 4H-SiC Metal-Oxide-Semiconductor Devices Utilising Atomic Layer Deposited Layers with Enhanced Interface Quality (2022)

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1149/ma2022-01191065mtgabs

Publication URI: http://dx.doi.org/10.1149/ma2022-01191065mtgabs

Type: Journal Article/Review

Parent Publication: ECS Meeting Abstracts

Issue: 19