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A Study of High Resistivity Semi-Insulating 4H-SiC Epilayers Formed via the Implantation of Germanium and Vanadium (2022)

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.4028/p-92w3k6

Publication URI: http://dx.doi.org/10.4028/p-92w3k6

Type: Journal Article/Review

Parent Publication: Materials Science Forum