Ductile Dicing for Optical Facets and Waveguides in Silicon Nitride (2023)
Attributed to:
Silicon-rich silicon nitride Nonlinear Integrated Photonic ciRcuits & Systems (juNIPeRS)
funded by
EPSRC
Abstract
No abstract provided
Bibliographic Information
Digital Object Identifier: http://dx.doi.org/10.1109/cleo/europe-eqec57999.2023.10232581
Publication URI: http://dx.doi.org/10.1109/cleo/europe-eqec57999.2023.10232581
Type: Conference/Paper/Proceeding/Abstract