📣 Try out the NEW Gateway to Research and let us know what you think.

We're looking for users to test the new service during August and September and share their feedback. Express your interest by completing this short form.

Structural and optical properties of yttrium oxide thin films for planar waveguiding applications (2010)

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1116/1.3503621

Publication URI: http://dx.doi.org/10.1116/1.3503621

Type: Journal Article/Review

Parent Publication: Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films

Issue: 6