Interferometer optimisation in RPM
Lead Participant:
INFINITESIMA LIMITED
Abstract
Infinitesima develops and manufactures the Rapid Probe Microscope (RPM). It is a very high speed atomic force microscope (AFM) with particular application within the semiconductor industry. At the heart of the system is highly sensitive interferometric closed loop control over three (x,y,z) axes. The height (z axis) is the most challenging and also the most critical. Within this project we will explore, in collaboration with world class experts from NPL, if there are aspects of the design of this part of the system that can be further optimised to continuously improve the performance of this measurement system.
Lead Participant | Project Cost | Grant Offer |
---|---|---|
INFINITESIMA LIMITED | £15,872 | £ 15,872 |
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Participant |
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NPL MANAGEMENT LIMITED | £33,808 | |
NATIONAL PHYSICAL LABORATORY LIMITED | ||
INNOVATE UK | ||
NPL MANAGEMENT LIMITED |
People |
ORCID iD |
Patrick Hole (Project Manager) |