University of York and Oxford Instruments Nanotechnology Tools Limited
Lead Participant:
UNIVERSITY OF YORK
Abstract
To achieve greater yields from semiconductor wafers produced using plasma processing by incorporating structured electrodes into the reactor.
Lead Participant | Project Cost | Grant Offer |
|---|---|---|
| UNIVERSITY OF YORK | £196,302 | £ 98,151 |
Participant |
||
| KTN LTD | ||
| UNIVERSITY OF YORK | ||
| OXFORD INSTRUMENTS NANOTECHNOLOGY TOOLS LIMITED |
People |
ORCID iD |