Site-selective dopant profiling of p-n junction specimens in the dual-beam FIB/SEM system (2010)
Abstract
No abstract provided
Bibliographic Information
Digital Object Identifier: http://dx.doi.org/10.1088/1742-6596/209/1/012069
Publication URI: http://dx.doi.org/10.1088/1742-6596/209/1/012069
Type: Journal Article/Review
Parent Publication: Journal of Physics: Conference Series