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Progress towards quantitative dopant profiling in the SEM (2010)

First Author: Chee K

Attributed to: Quantitative, high resolution two-and-three dimensional dopant mapping in the Scanning Electron Microscope by Secondary Electron Spectro-Micro funded by EPSRC

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1088/1742-6596/209/1/012054

Publication URI: http://dx.doi.org/10.1088/1742-6596/209/1/012054

Type: Journal Article/Review

Parent Publication: Journal of Physics: Conference Series