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Influence of surface conditions on plasma dynamics and electron heating in a radio-frequency driven capacitively coupled oxygen plasma (2015)

First Author: Greb A

Attributed to: Interactions between micro-plasma devices funded by EPSRC

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1088/0963-0252/24/4/044003

Publication URI: http://dx.doi.org/10.1088/0963-0252/24/4/044003

Type: Journal Article/Review

Parent Publication: Plasma Sources Science and Technology

Issue: 4