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Slope and amplitude asymmetry effects on low frequency capacitively coupled carbon tetrafluoride plasmas (2016)

First Author: Bruneau B

Attributed to: Interactions between micro-plasma devices funded by EPSRC

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1063/1.4947453

Publication URI: http://dx.doi.org/10.1063/1.4947453

Type: Journal Article/Review

Parent Publication: Journal of Applied Physics

Issue: 16