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Fabrication of 3C-SiC MOS Capacitors Using High-Temperature Oxidation (2015)

First Author: Sharma Y

Attributed to: Vehicle Electrical Systems Integration (VESI) funded by UKRI

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.4028/www.scientific.net/msf.821-823.464

Publication URI: http://dx.doi.org/10.4028/www.scientific.net/msf.821-823.464

Type: Journal Article/Review

Parent Publication: Materials Science Forum