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Surface topography acquisition method for double-sided near-right-angle structured surfaces based on dual-probe wavelength scanning interferometry. (2017)

First Author: Zhang T
Attributed to:  EPSRC Centre for Innovative Manufacturing in Advanced Metrology funded by EPSRC

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1364/oe.25.024148

PubMed Identifier: 29041360

Publication URI: http://europepmc.org/abstract/MED/29041360

Type: Journal Article/Review

Volume: 25

Parent Publication: Optics express

Issue: 20

ISSN: 1094-4087