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Correlation and convolution filtering and image processing for pitch evaluation of 2D micro- and nano-scale gratings and lattices. (2017)

First Author: Chen X
Attributed to:  EPSRC Centre for Innovative Manufacturing in Advanced Metrology funded by EPSRC

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1364/ao.56.002434

PubMed Identifier: 28375349

Publication URI: http://europepmc.org/abstract/MED/28375349

Type: Journal Article/Review

Volume: 56

Parent Publication: Applied optics

Issue: 9

ISSN: 1559-128X