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Tailored voltage waveform capacitively coupled plasmas in electronegative gases: frequency dependence of asymmetry effects (2016)

First Author: Schüngel E

Attributed to: Interactions between micro-plasma devices funded by EPSRC

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1088/0022-3727/49/26/265203

Publication URI: http://dx.doi.org/10.1088/0022-3727/49/26/265203

Type: Journal Article/Review

Parent Publication: Journal of Physics D: Applied Physics

Issue: 26