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AlScN thin film based surface acoustic wave devices with enhanced microfluidic performance (2016)

First Author: Wang W

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1088/0960-1317/26/7/075006

Publication URI: http://dx.doi.org/10.1088/0960-1317/26/7/075006

Type: Journal Article/Review

Parent Publication: Journal of Micromechanics and Microengineering

Issue: 7

ISSN: 0960-1317