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Fabrication of silicon slot waveguides with 10nm wide oxide slot (2017)

First Author: Debnath K

Attributed to: Silicon Photonics for Future Systems funded by EPSRC

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1109/group4.2017.8082184

Publication URI: http://dx.doi.org/10.1109/group4.2017.8082184

Type: Conference/Paper/Proceeding/Abstract