Nitrogen in Diamond. (2020)
Attributed to:
Metrology concepts for a new generation of plasma manufacturing with atom-scale precision
funded by
EPSRC
Abstract
No abstract provided
Bibliographic Information
Digital Object Identifier: http://dx.doi.org/10.1021/acs.chemrev.9b00518
PubMed Identifier: 32048841
Publication URI: http://europepmc.org/abstract/MED/32048841
Type: Journal Article/Review
Volume: 120
Parent Publication: Chemical reviews
Issue: 12
ISSN: 0009-2665