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High level active n + doping of strained germanium through co-implantation and nanosecond pulsed laser melting (2018)

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1063/1.5012512

Publication URI: http://dx.doi.org/10.1063/1.5012512

Type: Journal Article/Review

Parent Publication: Journal of Applied Physics

Issue: 16