Fabrication of high-Q film bulk acoustic resonator (FBAR) filters with carbon nanotube (CNT) electrodes (2010)
Abstract
No abstract provided
Bibliographic Information
Digital Object Identifier: http://dx.doi.org/10.1109/ultsym.2010.5935514
Publication URI: http://dx.doi.org/10.1109/ultsym.2010.5935514
Type: Conference/Paper/Proceeding/Abstract