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A Simulation Study of the Temperature Sensitivity and Impact of Fabrication Tolerances on the Performance of a Geometric Anti-Spring Based MEMS Gravimeter (2022)

First Author: Belwanshi V

Attributed to: Monolithic Silicon Photonics Interferometer for Ultra-sensitive MEMS Sensors funded by STFC

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1109/inertial53425.2022.9787761

Publication URI: http://dx.doi.org/10.1109/inertial53425.2022.9787761

Type: Conference/Paper/Proceeding/Abstract