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Three-Dimensional Simulation Platform for Optimal Designs of the MEMS Microphone (2022)

First Author: Cai J

Attributed to: Thin Film Acoustic Wave Platform for Conformable and Mechanically Flexible Biosensors funded by EPSRC

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.3389/fmats.2022.959480

Publication URI: http://dx.doi.org/10.3389/fmats.2022.959480

Type: Journal Article/Review

Parent Publication: Frontiers in Materials