Large-area synthesis of high electrical performance MoS2 by a commercially scalable atomic layer deposition process (2023)
Attributed to:
University of Southampton - Equipment Account
funded by
EPSRC
Abstract
No abstract provided
Bibliographic Information
Digital Object Identifier: http://dx.doi.org/10.1038/s41699-023-00379-z
Publication URI: http://dx.doi.org/10.1038/s41699-023-00379-z
Type: Journal Article/Review
Parent Publication: npj 2D Materials and Applications
Issue: 1