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Deeply Sub-Wavelength Non-Contact Optical Metrology of Sub-Wavelength Objects (2021)

First Author: Rendon-Barraza C

Attributed to: National Hub in High Value Photonic Manufacturing funded by EPSRC

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1109/cleo/europe-eqec52157.2021.9541963

Publication URI: http://dx.doi.org/10.1109/cleo/europe-eqec52157.2021.9541963

Type: Conference/Paper/Proceeding/Abstract