Ion Implantation and Electrical Annealing for Trimming Silicon MZIs and Facilitating One-Time Programmable Photonic Circuits (2019)
Attributed to:
Silicon Photonics for Future Systems
funded by
EPSRC
Abstract
No abstract provided
Bibliographic Information
Digital Object Identifier: http://dx.doi.org/10.1109/group4.2019.8853925
Publication URI: http://dx.doi.org/10.1109/group4.2019.8853925
Type: Conference/Paper/Proceeding/Abstract
ISSN: 19492081