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Miniaturized thermal acoustic gas sensor based on a CMOS microhotplate and MEMS microphone. (2022)

First Author: Hopper R

Attributed to: New Industrial Systems: Optimising Me Manufacturing Systems funded by EPSRC

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.17863/cam.80143

Publication URI: https://www.repository.cam.ac.uk/handle/1810/332699

Type: Journal Article/Review