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Operational Experiences Tuning the ATF2 Final Focus Optics Towards Obtaining a 37nm Electron Beam IP Spot Size (2010)

First Author: White, Glen And Seryi, Andrei And Woodley, Mark And Bai, Sha And Bambade, Philip And Others

Abstract

No abstract provided

Bibliographic Information

Type: Conference/Paper/Proceeding/Abstract

Volume: C100523

Parent Publication: Conf.Proc.