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High-pressure chemical deposition for void-free filling of extreme aspect ratio templates. (2010)

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1002/adma.201001199

PubMed Identifier: 20827671

Publication URI: http://europepmc.org/abstract/MED/20827671

Type: Journal Article/Review

Volume: 22

Parent Publication: Advanced materials (Deerfield Beach, Fla.)

Issue: 41

ISSN: 0935-9648