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High-density remote plasma sputtering of high-dielectric-constant amorphous hafnium oxide films (2013)

First Author: Li F

Attributed to: Printed Logic Supply Chain (FlexIC) - TSB App. No. 155 funded by EPSRC

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1002/pssb.201248520

Publication URI: http://dx.doi.org/10.1002/pssb.201248520

Type: Journal Article/Review

Parent Publication: physica status solidi (b)

Issue: 5