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Ultra-violet light assisted reactive RF magnetron sputtering deposition of AlN thin films at room temperature (2012)

First Author: Feng B

Attributed to: Film Bulk Acoustic Resonator-based Ultra-Sensitive Biosensor Array Using Low Cost Piezoelectric Polymer as the Active Material funded by EPSRC

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1016/j.matlet.2012.03.083

Publication URI: http://dx.doi.org/10.1016/j.matlet.2012.03.083

Type: Journal Article/Review

Parent Publication: Materials Letters